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    Method for high volume manufacturing of thin film batteries
    2.
    发明授权
    Method for high volume manufacturing of thin film batteries 有权
    薄膜电池大批量生产方法

    公开(公告)号：US08168318B2

    公开(公告)日：2012-05-01

    申请号：US12257049

    申请日：2008-10-23

    申请人： Byung Sung Kwak ,  Nety M. Krishna ,  Kurt Eisenbeiser ,  William J. Dauksher ,  Jon Candelaria

    发明人： Byung Sung Kwak ,  Nety M. Krishna ,  Kurt Eisenbeiser ,  William J. Dauksher ,  Jon Candelaria

    IPC分类号： H01M6/16 ,  H01M6/18 ,  H01M6/46

    CPC分类号： H01M10/0585 ,  H01M6/40 ,  H01M10/0436 ,  H01M10/052 ,  H01M2300/0068

    摘要： Concepts and methods are provided to reduce the cost and complexity of thin film battery (TFB) high volume manufacturing by eliminating and/or minimizing the use of conventional physical (shadow) masks. Laser scribing and other alternative physical maskless patterning techniques meet certain or all of the patterning requirements. In one embodiment, a method of manufacturing thin film batteries comprises providing a substrate, depositing layers corresponding to a thin film battery structure on the substrate, the layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of the deposited layers is unpatterned by a physical mask during deposition, depositing a protective coating, and scribing the layers and the protective coating. Further, the edges of the layers may be covered by an encapsulation layer. Furthermore, the layers may be deposited on two substrates and then laminated to form the thin film battery.

    摘要翻译： 提供了概念和方法，以通过消除和/或最小化常规物理（阴影）掩模的使用来降低薄膜电池（TFB）大批量制造的成本和复杂性。 激光划线和其他可选的物理无掩模图案化技术满足某些或所有图案化要求。 在一个实施例中，制造薄膜电池的方法包括提供衬底，在衬底上沉积与薄膜电池结构相对应的层，所述层按沉积顺序包括阴极，电解质和阳极，其中至少 沉积层中的一个在沉积期间由物理掩模未图案化，沉积保护涂层，以及划刻层和保护涂层。 此外，层的边缘可以被封装层覆盖。 此外，可以将这些层沉积在两个基板上，然后层压以形成薄膜电池。

    PLASMA ENHANCED THERMAL EVAPORATOR
    3.
    发明申请
    PLASMA ENHANCED THERMAL EVAPORATOR 审中-公开
    等离子体增强型热蒸发器

    公开(公告)号：US20100267191A1

    公开(公告)日：2010-10-21

    申请号：US12763856

    申请日：2010-04-20

    申请人： Byung-Sung Kwak ,  Kaushal K. Singh ,  Stefan Bangert ,  Nety M. Krishna

    发明人： Byung-Sung Kwak ,  Kaushal K. Singh ,  Stefan Bangert ,  Nety M. Krishna

    IPC分类号： H01L31/18

    CPC分类号： H01L31/18 ,  C23C16/4485 ,  C23C16/45565 ,  H01L31/03923

    摘要： The present invention generally provides a method for forming a photovoltaic device including evaporating a source material to form a large molecule processing gas and flowing the large molecule processing gas through a gas distribution showerhead and into a processing area of a processing chamber having a substrate therein. The method includes generating a small molecule processing gas, and reacting the small molecule processing gas with a film already deposited on a substrate surface to form a semiconductor film. Additionally, apparatuses that may use the methods are also provided to enable continuous inline CIGS type solar cell formation.

    摘要翻译： 本发明通常提供一种形成光伏器件的方法，包括蒸发源材料以形成大分子加工气体，并使大分子处理气体通过气体分配喷头流入其中具有衬底的处理室的处理区域。 该方法包括生成小分子处理气体，并使小分子处理气体与已沉积在基板表面上的膜反应形成半导体膜。 此外，还可以使用可以使用这些方法的装置来实现连续的在线CIGS型太阳能电池的形成。

    METHOD FOR HIGH VOLUME MANUFACTURING OF THIN FILM BATTERIES
    6.
    发明申请
    METHOD FOR HIGH VOLUME MANUFACTURING OF THIN FILM BATTERIES 审中-公开
    薄膜电池高容量制造方法

    公开(公告)号：US20120214047A1

    公开(公告)日：2012-08-23

    申请号：US13461286

    申请日：2012-05-01

    申请人： BYUNG SUNG KWAK ,  Nety M. Krishna ,  Kurt Eisenbeiser ,  William J. Dauksher ,  Jon Candelaria

    发明人： BYUNG SUNG KWAK ,  Nety M. Krishna ,  Kurt Eisenbeiser ,  William J. Dauksher ,  Jon Candelaria

    IPC分类号： H01M4/70 ,  H01M2/02

    CPC分类号： H01M10/0585 ,  H01M6/40 ,  H01M10/0436 ,  H01M10/052 ,  H01M2300/0068

    摘要： Concepts and methods are provided to reduce the cost and complexity of thin film battery (TFB) high volume manufacturing by eliminating and/or minimizing the use of conventional physical (shadow) masks. Laser scribing and other alternative physical maskless patterning techniques meet certain or all of the patterning requirements. In one embodiment, a method of manufacturing thin film batteries comprises providing a substrate, depositing layers corresponding to a thin film battery structure on the substrate, the layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of the deposited layers is unpatterned by a physical mask during deposition, depositing a protective coating, and scribing the layers and the protective coating. Further, the edges of the layers may be covered by an encapsulation layer. Furthermore, the layers may be deposited on two substrates and then laminated to form the thin film battery.

    摘要翻译： 提供了概念和方法，以通过消除和/或最小化常规物理（阴影）掩模的使用来降低薄膜电池（TFB）大批量制造的成本和复杂性。 激光划线和其他可选的物理无掩模图案化技术满足某些或所有图案化要求。 在一个实施例中，制造薄膜电池的方法包括提供衬底，在衬底上沉积与薄膜电池结构相对应的层，所述层按沉积顺序包括阴极，电解质和阳极，其中至少 沉积层中的一个在沉积期间由物理掩模未图案化，沉积保护涂层，以及划刻层和保护涂层。 此外，层的边缘可以被封装层覆盖。 此外，可以将这些层沉积在两个基板上，然后层压以形成薄膜电池。

    METHOD FOR HIGH VOLUME MANUFACTURING OF THIN FILM BATTERIES
    7.
    发明申请
    METHOD FOR HIGH VOLUME MANUFACTURING OF THIN FILM BATTERIES 有权
    薄膜电池高容量制造方法

    公开(公告)号：US20090148764A1

    公开(公告)日：2009-06-11

    申请号：US12257049

    申请日：2008-10-23

    申请人： Byung Sung Kwak ,  Nety M. Krishna ,  Kurt Eisenbelser ,  William J. Dauksher ,  Jon Candelaria

    发明人： Byung Sung Kwak ,  Nety M. Krishna ,  Kurt Eisenbelser ,  William J. Dauksher ,  Jon Candelaria

    IPC分类号： H01M6/18 ,  B05D5/12

    CPC分类号： H01M10/0585 ,  H01M6/40 ,  H01M10/0436 ,  H01M10/052 ,  H01M2300/0068

    摘要： Concepts and methods are provided to reduce the cost and complexity of thin film battery (TFB) high volume manufacturing by eliminating and/or minimizing the use of conventional physical (shadow) masks. Laser scribing and other alternative physical maskless patterning techniques meet certain or all of the patterning requirements. In one embodiment, a method of manufacturing thin film batteries comprises providing a substrate, depositing layers corresponding to a thin film battery structure on the substrate, the layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of the deposited layers is unpatterned by a physical mask during deposition, depositing a protective coating, and scribing the layers and the protective coating. Further, the edges of the layers may be covered by an encapsulation layer. Furthermore, the layers may be deposited on two substrates and then laminated to form the thin film battery.

    摘要翻译： 提供了概念和方法，以通过消除和/或最小化常规物理（阴影）掩模的使用来降低薄膜电池（TFB）大批量制造的成本和复杂性。 激光划线和其他可选的物理无掩模图案化技术满足某些或所有图案化要求。 在一个实施例中，制造薄膜电池的方法包括提供衬底，在衬底上沉积与薄膜电池结构相对应的层，所述层按沉积顺序包括阴极，电解质和阳极，其中至少 沉积层中的一个在沉积期间由物理掩模未图案化，沉积保护涂层，以及划刻层和保护涂层。 此外，层的边缘可以被封装层覆盖。 此外，可以将这些层沉积在两个基板上，然后层压以形成薄膜电池。

    Solar cell patterning and metallization
    8.
    发明授权
    Solar cell patterning and metallization 失效
    太阳能电池图案化和金属化

    公开(公告)号：US08283199B2

    公开(公告)日：2012-10-09

    申请号：US12624668

    申请日：2009-11-24

    申请人： Virendra V. S. Rana ,  Chris Eberspacher ,  Karl J. Armstrong ,  Nety M. Krishna

    发明人： Virendra V. S. Rana ,  Chris Eberspacher ,  Karl J. Armstrong ,  Nety M. Krishna

    IPC分类号： H01L21/28 ,  H01L21/312 ,  H01L31/0224

    CPC分类号： H01L31/022425 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/0747 ,  Y02E10/547

    摘要： Embodiments of the present invention generally provide methods for forming conductive structures on the surfaces of a solar cell. In one embodiment, conductive structures are formed on the front surface of a solar cell by depositing a sacrificial polymer layer, forming patterned lines in the sacrificial polymer via a fluid jet, depositing metal layers over the front surface of the solar cell, and performing lift off of the metal layers deposited over the sacrificial polymer by dissolving the sacrificial polymer with a water based solvent. In another embodiment, conductive structures are formed on the back surface of a solar cell by depositing a sacrificial polymer layer, forming patterned lines in the sacrificial polymer via a fluid jet, depositing a metal layer over the back surface of the solar cell, and performing lift off of the metal layer deposited over the sacrificial polymer by dissolving the sacrificial polymer with a water based solvent, and completing selective metallization of the remaining metal lines.

    摘要翻译： 本发明的实施例通常提供在太阳能电池的表面上形成导电结构的方法。 在一个实施例中，通过沉积牺牲聚合物层在导电结构的前表面上形成导电结构，通过流体射流在牺牲聚合物中形成图案线，在太阳能电池的前表面上沉积金属层，并执行电梯 通过用水基溶剂溶解牺牲聚合物来沉积在牺牲聚合物上的金属层。 在另一个实施例中，通过沉积牺牲聚合物层，在牺牲聚合物中形成图案化线，经由流体射流，在太阳能电池的背面上沉积金属层，并在 通过用水基溶剂溶解牺牲聚合物，从而沉积在牺牲聚合物上沉积的金属层，并完成其余金属线的选择性金属化。

    PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS AND THERMAL EXCITATION
    9.
    发明申请
    PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS AND THERMAL EXCITATION 有权
    使用能量离子和热激发形成磁薄膜的方法

    公开(公告)号：US20100096256A1

    公开(公告)日：2010-04-22

    申请号：US12255865

    申请日：2008-10-22

    申请人： OMKARAM NALAMASU ,  Steven Verhaverbeke ,  Majeed Foad ,  Mahalingam Venkatesan ,  Nety M. Krishna

    发明人： OMKARAM NALAMASU ,  Steven Verhaverbeke ,  Majeed Foad ,  Mahalingam Venkatesan ,  Nety M. Krishna

    IPC分类号： C23F1/02

    CPC分类号： G11B5/84 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/746 ,  G11B5/82 ,  G11B5/855 ,  H01F41/34

    摘要： A method for patterning a magnetic thin film on a substrate includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate selective regions and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portion of the magnetic thin film is subjected to thermal excitation. The portions of the magnetic thin film are rendered to exhibit a magnetic property different than selective other portions. A method for patterning a magnetic media with a magnetic thin film on both sides of the media is also disclosed.

    摘要翻译： 用于在衬底上图案化磁性薄膜的方法包括：提供围绕磁性薄膜的图案，该图案的选择区域允许一个或多个元件的激发离子的穿透。 通过足够的能量产生通电的离子以穿透选择区域和一部分与选择区域相邻的磁性薄膜。 放置基板以接收通电离子。 磁性薄膜的一部分经受热激发。 使磁性薄膜的部分呈现与选择性其他部分不同的磁性。 还公开了在介质两侧用磁性薄膜图案化磁性介质的方法。