发明授权
- 专利标题: Probe card and test apparatus including the same
- 专利标题(中): 探针卡和测试仪器包括它们
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申请号: US12817826申请日: 2010-06-17
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公开(公告)号: US08581612B2公开(公告)日: 2013-11-12
- 发明人: Hideki Horii , Young-kuk Kim , Mi-lim Park
- 申请人: Hideki Horii , Young-kuk Kim , Mi-lim Park
- 申请人地址: KR Suwon-Si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR10-2009-0115190 20091126
- 主分类号: G01R31/20
- IPC分类号: G01R31/20
摘要:
A probe card and a test apparatus including the probe card for improving test reliability. The probe card may include a first input terminal Microelectromechanical Systems (MEMS) switch that connects a first input terminal and a first input probe pin, wherein the first input terminal MEMS switch comprises a control portion that receives an operation signal and a connection portion that connects the first input terminal and the first input probe pin. The probe card may further include a first output terminal MEMS switch that connects a first output terminal and a first output probe pin, wherein the first output terminal MEMS switch comprises a control portion that receives the operation signal and a connection portion that connects the first output terminal and the first output probe pin.
公开/授权文献
- US20110121852A1 PROBE CARD AND TEST APPARATUS INCLUDING THE SAME 公开/授权日:2011-05-26
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