Invention Grant
- Patent Title: Method of manufacturing a gas electron multiplier
- Patent Title (中): 制造气体电子倍增器的方法
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Application No.: US12937755Application Date: 2008-04-14
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Publication No.: US08597490B2Publication Date: 2013-12-03
- Inventor: Rui De Oliveira , Serge Duarte Pinto
- Applicant: Rui De Oliveira , Serge Duarte Pinto
- Applicant Address: CH Geneva
- Assignee: CERN—European Organization for Nuclear Research
- Current Assignee: CERN—European Organization for Nuclear Research
- Current Assignee Address: CH Geneva
- Agency: Sunstein Kann Murphy & Timbers LLP
- International Application: PCT/EP2008/002944 WO 20080414
- International Announcement: WO2009/127220 WO 20091022
- Main IPC: C25F3/00
- IPC: C25F3/00 ; C25F3/02 ; C25F3/04

Abstract:
Methods for manufacturing a gas electron multiplier. One method comprises a step of preparing a blank sheet comprised of an insulating sheet with first and second metal layers on its surface, a first metal layer hole forming step in which the first metal layer is patterned by means of photolithography, such as to form holes through the first metal layer, an insulating sheet hole forming step, in which the holes formed in the first metal layer are extended through the insulating layer by etching from the first surface side only, and a second metal layer hole forming step, in which the holes are extended through the second metal layer. Alternatively, the second metal layer hole forming step is performed by electrochemical etching, such that the first metal layer remains unaffected during etching of the second metal layer. In another embodiment, in the second metal layer hole forming step, the first and second metal layers are etched from the outside, thereby reducing the initial thicknesses of the first and second metal layers and the second metal layer is simultaneously etched through the holes in the first metal layer and the insulating sheet, said etching being maintained until the holes extend through the second metal layer, wherein said initial average thickness of the first and second metal layers is between 6.5 μm and 25 μm, preferably between 7.5 μm and 12 μm.
Public/Granted literature
- US20110089042A1 METHOD OF MANUFACTURING A GAS ELECTRON MULTIPLIER Public/Granted day:2011-04-21
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