发明授权
- 专利标题： Semiconductor device property extraction, generation, visualization, and monitoring methods
- 专利标题（中）： 半导体器件属性提取，生成，可视化和监控方法
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申请号： US11830485申请日： 2007-07-30
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公开(公告)号： US08611639B2公开(公告)日： 2013-12-17
- 发明人: Ashok Kulkarni , Chien-Huei (Adam) Chen , Cecelia Campochiaro , Richard Wallingford , Yong Zhang , Brian Duffy
- 申请人： Ashok Kulkarni , Chien-Huei (Adam) Chen , Cecelia Campochiaro , Richard Wallingford , Yong Zhang , Brian Duffy
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Technologies Corp
- 当前专利权人： KLA-Tencor Technologies Corp
- 当前专利权人地址： US CA Milpitas
- 代理商 Ann Marie Mewherter
- 主分类号： G06K9/00
- IPC分类号： G06K9/00
摘要：
Various methods, carrier media, and systems for monitoring a characteristic of a specimen are provided. One computer-implemented method for monitoring a characteristic of a specimen includes determining a property of individual pixels on the specimen using output generated by inspecting the specimen with an inspection system. The method also includes determining a characteristic of individual regions on the specimen using the properties of the individual pixels in the individual regions. The method further includes monitoring the characteristic of the specimen based on the characteristics of the individual regions.
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