发明授权
- 专利标题： Target object processing system and method of controlling the same
- 专利标题（中）： 目标对象处理系统及其控制方法
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申请号： US12822558申请日： 2010-06-24
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公开(公告)号： US08612038B2公开(公告)日： 2013-12-17
- 发明人: Kenichi Kobayashi , Youichi Nakayama , Keiichiro Shiki
- 申请人： Kenichi Kobayashi , Youichi Nakayama , Keiichiro Shiki
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Pearne & Gordon LLP
- 优先权： JP2007-333438 20071226
- 主分类号： G06F19/00
- IPC分类号： G06F19/00 ; G05B19/18 ; G05B15/02 ; G05B11/01 ; C23C16/00 ; H01L21/311 ; H01L21/461 ; G06F17/50
摘要：
A processing system for performing a predetermined process on a target object includes one or more processing apparatuses that process the target object and a controller that controls the processing apparatuses. Here, the controller performs a control to select any one of a shutdown state in which a multiple number of end devices of the processing apparatuses are all stopped and a standby state in which some or all of the end devices are ready to perform a process on the target object, when the controller is shut down.
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