发明授权
- 专利标题: Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes
- 专利标题(中): 自动检测半导体晶片制造工艺的故障模式的系统和方法
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申请号: US13455186申请日: 2012-04-25
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公开(公告)号: US08627251B2公开(公告)日: 2014-01-07
- 发明人: Jui-Long Chen , Hui-Yun Chao , Yen-Di Tsen , Jong-I Mou
- 申请人: Jui-Long Chen , Hui-Yun Chao , Yen-Di Tsen , Jong-I Mou
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Duane Morris LLP
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A system and method of automatically detecting failure patterns for a semiconductor wafer process is provided. The method includes receiving a test data set collected from testing a plurality of semiconductor wafers, forming a respective wafer map for each of the wafers, determining whether each respective wafer map comprises one or more respective objects, selecting the wafer maps that are determined to comprise one or more respective objects, selecting one or more object indices for selecting a respective object in each respective selected wafer map, determining a plurality of object index values in each respective selected wafer map, selecting an object in each respective selected wafer map, determining a respective feature in each of the respective selected wafer, classifying a respective pattern for each of the respective selected wafer maps and using the respective wafer fingerprints to adjust one or more parameters of the semiconductor fabrication process.
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