发明授权
US08629523B2 Inserted reflective shield to improve quantum efficiency of image sensors
有权
插入反射屏蔽,提高图像传感器的量子效率
- 专利标题: Inserted reflective shield to improve quantum efficiency of image sensors
- 专利标题(中): 插入反射屏蔽,提高图像传感器的量子效率
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申请号: US12761736申请日: 2010-04-16
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公开(公告)号: US08629523B2公开(公告)日: 2014-01-14
- 发明人: Yu-Hao Shih , Szu-Ying Chen , Hsing-Lung Chen , Jen-Cheng Liu , Dun-Nian Yaung , Volume Chien
- 申请人: Yu-Hao Shih , Szu-Ying Chen , Hsing-Lung Chen , Jen-Cheng Liu , Dun-Nian Yaung , Volume Chien
- 申请人地址: TW
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW
- 代理机构: Lowe Hauptman & Ham, LLP
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232
摘要:
The structures of reflective shields and methods of making such structures described enable reflection of light that has not be absorbed by photodiodes in image sensor devices and increase quantum efficiency of the photodiodes. Such structures can be applied (or used) for any image sensors to improve image quality. Such structures are particular useful for image sensors with smaller pixel sizes and for long-wavelength light (or rays), whose absorption length (or depth) could be insufficient, especially for backside illumination (BSI) devices. The reflective shields could double, or more than double, the absorption depth for light passing through the image sensors and getting reflected back to the photodiodes. Concave-shaped reflective shields have the additional advantage of directing reflected light toward the image sensors.