发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US13547119申请日: 2012-07-12
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公开(公告)号: US08643008B2公开(公告)日: 2014-02-04
- 发明人: Shunpei Yamazaki , Naoto Yamade , Junichi Koezuka
- 申请人: Shunpei Yamazaki , Naoto Yamade , Junichi Koezuka
- 申请人地址: JP Atsugi-shi, Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi, Kanagawa-ken
- 代理机构: Robinson Intellectual Property Law Office, P.C.
- 代理商 Eric J. Robinson
- 优先权: JP2011-161222 20110722
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; H01L29/18 ; H01L27/148
摘要:
A semiconductor device which can operate at high speed and consumes a smaller amount of power is provided. In a semiconductor device including transistors each including an oxide semiconductor, the oxygen concentration of the oxide semiconductor film of the transistor having small current at negative gate voltage is different from that of the oxide semiconductor film of the transistor having high field-effect mobility and large on-state current. Typically, the oxygen concentration of the oxide semiconductor film of the transistor having high field-effect mobility and large on-state current is lower than that of the oxide semiconductor film of the transistor having small current at negative gate voltage.
公开/授权文献
- US20130020569A1 SEMICONDUCTOR DEVICE 公开/授权日:2013-01-24
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