发明授权
- 专利标题: High voltage resistor with pin diode isolation
- 专利标题(中): 具有二极管二极管隔离的高压电阻
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申请号: US13160030申请日: 2011-06-14
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公开(公告)号: US08664741B2公开(公告)日: 2014-03-04
- 发明人: Ru-Yi Su , Fu-Chih Yang , Chun Lin Tsai , Chih-Chang Cheng , Ruey-Hsin Liu
- 申请人: Ru-Yi Su , Fu-Chih Yang , Chun Lin Tsai , Chih-Chang Cheng , Ruey-Hsin Liu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L29/02
- IPC分类号: H01L29/02
摘要:
Provided is a high voltage semiconductor device that includes a PIN diode structure formed in a substrate. The PIN diode includes an intrinsic region located between a first doped well and a second doped well. The first and second doped wells have opposite doping polarities and greater doping concentration levels than the intrinsic region. The semiconductor device includes an insulating structure formed over a portion of the first doped well. The semiconductor device includes an elongate resistor device formed over the insulating structure. The resistor device has first and second portions disposed at opposite ends of the resistor device, respectively. The semiconductor device includes an interconnect structure formed over the resistor device. The interconnect structure includes: a first contact that is electrically coupled to the first doped well and a second contact that is electrically coupled to a third portion of the resistor located between the first and second portions.
公开/授权文献
- US20120319240A1 High Voltage Resistor With Pin Diode Isolation 公开/授权日:2012-12-20
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