发明授权
- 专利标题: Heat treatment apparatus
- 专利标题(中): 热处理设备
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申请号: US13040697申请日: 2011-03-04
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公开(公告)号: US08674273B2公开(公告)日: 2014-03-18
- 发明人: Tomihiro Yonenaga , Yumiko Kawano
- 申请人: Tomihiro Yonenaga , Yumiko Kawano
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2008-226590 20080904
- 主分类号: H05B6/10
- IPC分类号: H05B6/10 ; C23C16/00
摘要:
Provided is a heat treatment apparatus which, when simultaneously heating substrates placed on susceptors, is capable of controlling the uniformity of temperature within each substrate. The heat treatment apparatus includes: a reaction tube which performs predetermined treatment to wafers; a plurality of susceptors each of which has a mounting surface for mounting the wafer and is made of a conductive material; a rotatable quartz boat wherein the susceptors spaced apart in a direction perpendicular to the mounting surfaces are arranged and supported in the reaction tube; a magnetic field generating unit which is arranged on a sidewall of the processing chamber and includes a pair of electromagnets which generate an AC magnetic field in a direction parallel to the mounting surfaces of the susceptors and inductively heat the susceptors; and a control unit which controls the AC magnetic field generated by the magnetic field generating unit.
公开/授权文献
- US20110210117A1 HEAT TREATMENT APPARATUS 公开/授权日:2011-09-01
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