Invention Grant
- Patent Title: Video rate-enabling probes for atomic force microscopy
- Patent Title (中): 用于原子力显微镜的视频速率探测器
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Application No.: US13275451Application Date: 2011-10-18
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Publication No.: US08695111B2Publication Date: 2014-04-08
- Inventor: Chung Hoon Lee
- Applicant: Chung Hoon Lee
- Agency: The Marbury Law Group PLLC
- Main IPC: G01Q70/10
- IPC: G01Q70/10 ; G01Q70/16 ; G01Q70/14
Abstract:
Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.
Public/Granted literature
- US20120036602A1 Video rate-enabling probes for atomic force microscopy Public/Granted day:2012-02-09
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