发明授权
US08710402B2 Method of and apparatus for laser drilling holes with improved taper
失效
具有改进锥度的激光钻孔的方法和设备
- 专利标题: Method of and apparatus for laser drilling holes with improved taper
- 专利标题(中): 具有改进锥度的激光钻孔的方法和设备
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申请号: US11757253申请日: 2007-06-01
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公开(公告)号: US08710402B2公开(公告)日: 2014-04-29
- 发明人: Weisheng Lei , Hisashi Matsumoto , Gregg Hardy , Yunlong Sun
- 申请人: Weisheng Lei , Hisashi Matsumoto , Gregg Hardy , Yunlong Sun
- 申请人地址: US OR Portland
- 专利权人: Electro Scientific Industries, Inc.
- 当前专利权人: Electro Scientific Industries, Inc.
- 当前专利权人地址: US OR Portland
- 主分类号: B23K26/00
- IPC分类号: B23K26/00 ; B23K26/08
摘要:
A method of and an apparatus for drilling blind vias with selectable tapers in multilayer electronic circuits permit forming electrical connections between layers while maintaining quality and throughput. The method relies on recognizing that the top diameter of the via and the bottom diameter of the via, which define the taper, are functions of two separate sets of equations. Simultaneous solution of these equations yields a solution space that enables optimization of throughput while maintaining selected taper and quality using temporally unmodified Q-switched CO2 laser pulses with identical pulse parameters. Real time pulse tailoring is not required; therefore, system complexity and cost may be reduced.
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