发明授权
- 专利标题： Semiconductor processing system; a semiconductor processing chamber; and a method for loading, unloading and exchanging semiconductor work pieces from a semiconductor processing chamber
- 专利标题（中）： 半导体处理系统; 半导体处理室; 以及用于从半导体处理室加载，卸载和交换半导体工件的方法
-
申请号： US11440747申请日： 2006-05-24
-
公开(公告)号： US08715418B2公开(公告)日： 2014-05-06
- 发明人: AiHua Chen
- 申请人： AiHua Chen
- 申请人地址： KY George Town, Grand Cayman
- 专利权人： Advanced Micro-Fabrication Equipment, Inc. Asia
- 当前专利权人： Advanced Micro-Fabrication Equipment, Inc. Asia
- 当前专利权人地址： KY George Town, Grand Cayman
- 代理机构： Nixon Peabody LLP
- 代理商 Joseph Bach, Esq.
- 优先权： CN200510028562 20050805
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; H01L21/68
摘要：
A semiconductor processing system and related methodology is disclosed and which includes a processing chamber having an internal cavity and a transfer port; a transfer chamber which is positioned adjacent to the processing chamber; and a transfer apparatus having at least two extendible arms which are positioned within the transfer chamber, and wherein each of the extendible arms carry a semiconductor work piece into and out of the processing chamber by way of the transfer port, and wherein the at least two extendible arms are selectively vertically moveable, and further are each selectively moveable in the direction of the transfer port.
公开/授权文献
信息查询
IPC分类:
