发明授权
- 专利标题： Micro-electro mechanical systems (MEMS) having outgasing prevention structures and methods of forming the same
- 专利标题（中）： 具有防止结构的微机电系统（MEMS）及其形成方法
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申请号： US13399903申请日： 2012-02-17
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公开(公告)号： US08716852B2公开(公告)日： 2014-05-06
- 发明人: Chia-Pao Shu , Chia-Ming Hung , Wen-Chuan Tai , Hung-Sen Wang , Hsiang-Fu Chen , Alex Kalnitsky
- 申请人： Chia-Pao Shu , Chia-Ming Hung , Wen-Chuan Tai , Hung-Sen Wang , Hsiang-Fu Chen , Alex Kalnitsky
- 申请人地址： TW
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW
- 代理机构： Lowe Hauptman & Ham, LLP
- 主分类号： H01L23/26
- IPC分类号： H01L23/26 ; H01L21/54
摘要：
A device includes a capping substrate bonded with a substrate structure. The substrate structure includes an integrated circuit structure. The integrated circuit structure includes a top metallic layer disposed on an outgasing prevention structure. At least one micro-electro mechanical system (MEMS) device is disposed over the top metallic layer and the outgasing prevention structure.
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