Invention Grant
- Patent Title: Oxide sintered body, target, transparent conductive film obtained by using the same, and transparent conductive substrate
- Patent Title (中): 氧化物烧结体,靶,使用其的透明导电膜,透明导电性基板
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Application No.: US13759277Application Date: 2013-02-05
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Publication No.: US08728635B2Publication Date: 2014-05-20
- Inventor: Tokuyuki Nakayama , Yoshiyuki Abe
- Applicant: Sumitomo Metal Mining Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Metal Mining Co., Ltd.
- Current Assignee: Sumitomo Metal Mining Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2006-159266 20060608
- Main IPC: B32B15/04
- IPC: B32B15/04 ; C04B35/04 ; C04B35/10 ; C04B35/453

Abstract:
An oxide sintered body having zinc oxide as a main component and containing magnesium, and a transparent conductive substrate are provided, and an oxide sintered body having zinc oxide and magnesium, wherein content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Mg); an oxide sintered body having zinc oxide, magnesium, gallium and/or aluminum, wherein content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+Al)/(Zn+Ga+Al), and content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Ga+Al+Mg); a target obtained by processing these oxide sintered bodies; and a transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using this target.
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