Invention Grant
US08728635B2 Oxide sintered body, target, transparent conductive film obtained by using the same, and transparent conductive substrate 有权
氧化物烧结体,靶,使用其的透明导电膜,透明导电性基板

Oxide sintered body, target, transparent conductive film obtained by using the same, and transparent conductive substrate
Abstract:
An oxide sintered body having zinc oxide as a main component and containing magnesium, and a transparent conductive substrate are provided, and an oxide sintered body having zinc oxide and magnesium, wherein content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Mg); an oxide sintered body having zinc oxide, magnesium, gallium and/or aluminum, wherein content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+Al)/(Zn+Ga+Al), and content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Ga+Al+Mg); a target obtained by processing these oxide sintered bodies; and a transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using this target.
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