Invention Grant
US08741547B2 Multi charged particle beam writing apparatus and multi charged particle beam writing method 有权
多带电粒子束写入装置和多带电粒子束写入方法

Multi charged particle beam writing apparatus and multi charged particle beam writing method
Abstract:
A multi charged particle beam writing apparatus according to an embodiment, includes a setting unit to set a second region such that more openings in remaining openings except for an opening through which the defective beam passes are included in the second region, a selection unit to select a mode from a first mode in which a pattern is written on a target object by using multiple beams having passed openings in the second region and a second mode in which multiple writing is performed while shifting a position by using at least one of remaining multiple beams in the state where the defective beam is controlled to be beam off and additional writing is performed for a position which was supposed to be written by the defective beam, and a writing processing control unit to control to write in the mode selected.
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