发明授权
- 专利标题： Image sensor cross-talk reduction system and method
- 专利标题（中）： 图像传感器串扰减少系统及方法
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申请号： US13439628申请日： 2012-04-04
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公开(公告)号： US08759928B2公开(公告)日： 2014-06-24
- 发明人: Shih-Chieh Chang , Jian-Shin Tsai , Chih-Chang Huang , Ing-Ju Lee , Chi-Cheng Hung , Jun-Nan Nian , Chih-Chung Chang
- 申请人： Shih-Chieh Chang , Jian-Shin Tsai , Chih-Chang Huang , Ing-Ju Lee , Chi-Cheng Hung , Jun-Nan Nian , Chih-Chung Chang
- 申请人地址： TW Hsin-Chu
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW Hsin-Chu
- 代理机构： Slater and Matsil, L.L.P.
- 主分类号： H01L31/02
- IPC分类号： H01L31/02 ; H01L27/14
摘要：
A system and method for reducing cross-talk in complementary metal oxide semiconductor back side illuminated image sensors is provided. An embodiment comprises forming a grid around the pixel regions on an opposite side of the substrate than metallization layers. The grid may be formed of a material such as tungsten with a (110)-rich crystalline orientation. This orientation helps prevents defects that can occur during patterning of the grid.
公开/授权文献
- US20130264668A1 Image Sensor Cross-Talk Reduction System and Method 公开/授权日：2013-10-10
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