发明授权
US08765582B2 Method for extreme ultraviolet electrostatic chuck with reduced clamp effect 有权
减少夹具效应的极紫外线静电卡盘的方法

Method for extreme ultraviolet electrostatic chuck with reduced clamp effect
摘要:
The present disclosure provides one embodiment of a semiconductor structure. The semiconductor structure includes a semiconductor substrate having a front surface and a backside surface; integrated circuit features formed on the front surface of the semiconductor substrate; and a polycrystalline silicon layer disposed on the backside surface of the semiconductor substrate.
信息查询
0/0