Invention Grant
- Patent Title: Power semiconductor device and fabrication method thereof
- Patent Title (中): 功率半导体器件及其制造方法
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Application No.: US13592560Application Date: 2012-08-23
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Publication No.: US08772833B2Publication Date: 2014-07-08
- Inventor: Woo Jin Chang , Jong Won Lim , Ho Kyun Ahn , Sang Choon Ko , Sung Bum Bae , Chull Won Ju , Young Rak Park , Jae Kyoung Mun , Eun Soo Nam
- Applicant: Woo Jin Chang , Jong Won Lim , Ho Kyun Ahn , Sang Choon Ko , Sung Bum Bae , Chull Won Ju , Young Rak Park , Jae Kyoung Mun , Eun Soo Nam
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2011-0095274 20110921; KR10-2012-0077726 20120717
- Main IPC: H01L29/15
- IPC: H01L29/15

Abstract:
Disclosed are a power semiconductor device and a method of fabricating the same which can increase a breakdown voltage of the device through a field plate formed between a gate electrode and a drain electrode and achieve an easier manufacturing process at the same time. The power semiconductor device according to an exemplary embodiment of the present disclosure includes a source electrode and a drain electrode formed on a substrate; a dielectric layer formed between the source electrode and the drain electrode to have a lower height than heights of the two electrodes and including an etched part exposing the substrate; a gate electrode formed on the etched part; a field plate formed on the dielectric layer between the gate electrode and the drain electrode; and a metal configured to connect the field plate and the source electrode.
Public/Granted literature
- US20130069173A1 POWER SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2013-03-21
Information query
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