发明授权
- 专利标题: Power semiconductor device and fabrication method thereof
- 专利标题(中): 功率半导体器件及其制造方法
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申请号: US13592560申请日: 2012-08-23
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公开(公告)号: US08772833B2公开(公告)日: 2014-07-08
- 发明人: Woo Jin Chang , Jong Won Lim , Ho Kyun Ahn , Sang Choon Ko , Sung Bum Bae , Chull Won Ju , Young Rak Park , Jae Kyoung Mun , Eun Soo Nam
- 申请人: Woo Jin Chang , Jong Won Lim , Ho Kyun Ahn , Sang Choon Ko , Sung Bum Bae , Chull Won Ju , Young Rak Park , Jae Kyoung Mun , Eun Soo Nam
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2011-0095274 20110921; KR10-2012-0077726 20120717
- 主分类号: H01L29/15
- IPC分类号: H01L29/15
摘要:
Disclosed are a power semiconductor device and a method of fabricating the same which can increase a breakdown voltage of the device through a field plate formed between a gate electrode and a drain electrode and achieve an easier manufacturing process at the same time. The power semiconductor device according to an exemplary embodiment of the present disclosure includes a source electrode and a drain electrode formed on a substrate; a dielectric layer formed between the source electrode and the drain electrode to have a lower height than heights of the two electrodes and including an etched part exposing the substrate; a gate electrode formed on the etched part; a field plate formed on the dielectric layer between the gate electrode and the drain electrode; and a metal configured to connect the field plate and the source electrode.
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