Invention Grant
- Patent Title: Hydrogen barrier for ferroelectric capacitors
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Application No.: US13480044Application Date: 2012-05-24
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Publication No.: US08779485B2Publication Date: 2014-07-15
- Inventor: Kezhakkedath R. Udayakumar , Scott R. Summerfelt , Ted S. Moise , Manoj K. Jain
- Applicant: Kezhakkedath R. Udayakumar , Scott R. Summerfelt , Ted S. Moise , Manoj K. Jain
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Rose Alyssa Keagy; Frederick J. Telecky, Jr.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L23/48 ; H01L21/768 ; H01L49/02 ; H01L27/115
Abstract:
An integrated circuit containing a FeCap array. The FeCap array is at least partially surrounded on the sides by hydrogen barrier walls and on the top by a hydrogen barrier top plate. A method for at least partially enclosing a FeCap array with hydrogen barrier walls and a hydrogen barrier top plate.
Public/Granted literature
- US20120228739A1 HYDROGEN BARRIER FOR FERROELECTRIC CAPACITORS Public/Granted day:2012-09-13
Information query
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