发明授权
- 专利标题: Gate-last fabrication of quarter-gap MGHK FET
- 专利标题(中): 最后制造四分之一MGHK FET
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申请号: US13570388申请日: 2012-08-09
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公开(公告)号: US08786030B2公开(公告)日: 2014-07-22
- 发明人: Takashi Ando , Kisik Choi , Vijay Narayanan , Tenko Yamashita , Junli Wang
- 申请人: Takashi Ando , Kisik Choi , Vijay Narayanan , Tenko Yamashita , Junli Wang
- 申请人地址: US NY Armonk KY
- 专利权人: International Business Machines Corporation,GLOBALFOUNDRIES INC.
- 当前专利权人: International Business Machines Corporation,GLOBALFOUNDRIES INC.
- 当前专利权人地址: US NY Armonk KY
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
A quarter-gap p-type field effect transistor (PFET) formed by gate-last fabrication includes a gate stack formed on a silicon substrate, the gate stack including: a high-k dielectric layer located on the silicon substrate; and a gate metal layer located over the high-k dielectric layer, the gate metal layer including titanium nitride and having a thickness of about 20 angstroms; and a metal contact formed over the gate stack. A quarter-gap n-type field effect transistor (NFET) formed by gate-last fabrication includes a gate stack formed on a silicon substrate, the gate stack including: a high-k dielectric layer located on the silicon substrate; and a first gate metal layer located over the high-k dielectric layer, the first gate metal layer including titanium nitride; and a metal contact formed over the gate stack.
公开/授权文献
- US20120299123A1 Gate-Last Fabrication of Quarter-Gap MGHK FET 公开/授权日:2012-11-29
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