Invention Grant
- Patent Title: Structures for power transistor and methods of manufacture
- Patent Title (中): 功率晶体管和制造方法的结构
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Application No.: US13414292Application Date: 2012-03-07
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Publication No.: US08823098B2Publication Date: 2014-09-02
- Inventor: Qin Huang , Yuming Bai
- Applicant: Qin Huang , Yuming Bai
- Applicant Address: CN Wuxi, Jiangsu, Province
- Assignee: Wuxi Versine Semiconductor Corp. Ltd.
- Current Assignee: Wuxi Versine Semiconductor Corp. Ltd.
- Current Assignee Address: CN Wuxi, Jiangsu, Province
- Agency: Jacobson Holman PLLC
- Agent Jiwen Chen
- Priority: CN201110081027 20110331
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/088 ; H01L29/788 ; H01L29/78 ; H01L29/423 ; H01L29/739 ; H01L29/10 ; H01L29/08 ; H01L29/417

Abstract:
The invention discloses a manufacture method and structure of a power transistor, comprising a lower electrode, a substrate, a drift region, two first conductive regions, two second conductive regions, two gate units, an isolation structure and an upper electrode. The two second conductive region are between the two first conductive regions and the drift region; the two gate units are on the two second conductive regions; the isolation structure covers the two gate units; the upper electrode covers the isolation structure and connects to the two first conductive regions and the two second conductive regions electrically. When the substrate is of the first conductive type, the structure can be used as MOSFET. When the substrate is of the second conductive type, the structure can be used as IGBT. This structure has a small gate electrode area, which leads to less Qg, Qgd and Rdson and improves device performance.
Public/Granted literature
- US20120248534A1 STRUCTURES FOR POWER TRANSISTOR AND METHODS OF MANUFACTURE Public/Granted day:2012-10-04
Information query
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