发明授权
- 专利标题： Temperature measuring method, storage medium, and program
- 专利标题（中）： 温度测量方法，存储介质和程序
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申请号： US13248538申请日： 2011-09-29
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公开(公告)号： US08825434B2公开(公告)日： 2014-09-02
- 发明人: Chishio Koshimizu , Jun Yamawaku , Tatsuo Matsudo
- 申请人： Chishio Koshimizu , Jun Yamawaku , Tatsuo Matsudo
- 申请人地址： JP
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP
- 代理机构： Cantor Colburn LLP
- 优先权： JP2010-222821 20100930
- 主分类号： G01K11/00
- IPC分类号： G01K11/00 ; G01K11/12 ; G01B11/06 ; G01B9/02
摘要：
A temperature measuring method includes: transmitting a light to a measurement point of an object to be measured, the object being a substrate on which a thin film is formed; measuring a first interference wave caused by a reflected light from a surface of the substrate, and a second interference wave caused by reflected lights from an interface between the substrate and the thin film and from a rear surface of the thin film; calculating an optical path length from the first interference wave to the second interference wave; calculating a film thickness of the thin film; calculating an optical path difference between an optical path length of the substrate and the calculated optical path length; compensating for the optical path length from the first interference wave to the second interference wave; and calculating a temperature of the object at the measurement point.
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