发明授权
US08854149B2 MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator
有权
MEMS谐振器，其制造方法和使用MEMS谐振器的信号处理方法
- 专利标题： MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator
- 专利标题（中）： MEMS谐振器，其制造方法和使用MEMS谐振器的信号处理方法
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申请号： US13615656申请日： 2012-09-14
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公开(公告)号： US08854149B2公开(公告)日： 2014-10-07
- 发明人: Sheng-Shian Li , Cheng-Syun Li
- 申请人： Sheng-Shian Li , Cheng-Syun Li
- 申请人地址： TW Hsinchu
- 专利权人： National Tsing Hua University
- 当前专利权人： National Tsing Hua University
- 当前专利权人地址： TW Hsinchu
- 代理机构： CKC & Partners Co., Ltd.
- 优先权： TW101123297A 20120628
- 主分类号： H03B5/30
- IPC分类号： H03B5/30 ; H03H9/05 ; H03H9/24
摘要：
A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.
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