发明授权
US08859382B2 Methods of forming metal oxide and memory cells 有权
形成金属氧化物和记忆细胞的方法

Methods of forming metal oxide and memory cells
摘要:
Some embodiments include methods of forming memory cells. Metal oxide may be deposited over a first electrode, with the deposited metal oxide having a relatively low degree of crystallinity. The degree of crystallinity within the metal oxide may be increased after the deposition of the metal oxide. A dielectric material may be formed over the metal oxide, and a second electrode may be formed over the dielectric material. The degree of crystallinity may be increased with a thermal treatment. The thermal treatment may be conducted before, during, and/or after formation of the dielectric material.
公开/授权文献
信息查询
0/0