Invention Grant
- Patent Title: Electrode connecting structures containing copper
- Patent Title (中): 含铜电极连接结构
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Application No.: US13685174Application Date: 2012-11-26
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Publication No.: US08860221B2Publication Date: 2014-10-14
- Inventor: Kun-Sang Park , Byung-Lyul Park , Su-Kyoung Kim , Kwang-Jin Moon , Suk-Chul Bang , Do-Sun Lee , Dong-Chan Lim , Gil-Heyun Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, PA
- Priority: KR10-2011-0128430 20111202
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065

Abstract:
Provided are electrode-connecting structures or semiconductor devices, including a lower device including a lower substrate, a lower insulating layer formed on the lower substrate, and a lower electrode structure formed in the lower insulating layer, wherein the lower electrode structure includes a lower electrode barrier layer and a lower metal electrode formed on the lower electrode barrier layer, and an upper device including an upper substrate, an upper insulating layer formed under the upper substrate, and an upper electrode structure formed in the upper insulating layer, wherein the upper electrode structure includes an upper electrode barrier layer extending from the inside of the upper insulating layer under a bottom surface thereof and an upper metal electrode formed on the upper electrode barrier layer. The lower metal electrode is in direct contact with the upper metal electrode.
Public/Granted literature
- US20130140697A1 Electrode Connecting Structures Containing Copper Public/Granted day:2013-06-06
Information query
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