发明授权
- 专利标题： Piezoelectric device and method for manufacturing the same, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus
- 专利标题（中）： 压电器件及其制造方法，压电致动器，喷液头和液体喷射装置
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申请号： US12962567申请日： 2010-12-07
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公开(公告)号： US08870352B2公开(公告)日： 2014-10-28
- 发明人: Masao Nakayama , Hideki Hahiro
- 申请人： Masao Nakayama , Hideki Hahiro
- 申请人地址： JP Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Kilpatrick Townsend & Stockton LLP
- 优先权： JP2009-278267 20091208
- 主分类号： B41J2/045
- IPC分类号： B41J2/045 ; H01L41/09 ; H01L41/08 ; B41J2/16 ; H01L41/332 ; B41J2/14 ; H01L41/314
摘要：
A piezoelectric device includes: a substrate; a first electrode formed over the substrate; a first piezoelectric element formed over the first electrode; a low density region which is formed at a side of the first piezoelectric element and has density lower than that of the first piezoelectric element; a second piezoelectric element which is formed to cover the first piezoelectric element and the low density region; and a second electrode formed over the second piezoelectric element.
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