Invention Grant
- Patent Title: Method for manufacturing solar cell
- Patent Title (中): 制造太阳能电池的方法
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Application No.: US13890931Application Date: 2013-05-09
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Publication No.: US08889464B2Publication Date: 2014-11-18
- Inventor: Mann Yi , Jeonghyo Kwon , Seongeun Lee , Taeyoung Kwon
- Applicant: LG Electronics Inc.
- Applicant Address: KR Seoul
- Assignee: LG Electronics Inc.
- Current Assignee: LG Electronics Inc.
- Current Assignee Address: KR Seoul
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: KR10-2012-0094199 20120828
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0232 ; H01L31/0236 ; H01L21/02 ; H01L31/0216 ; H01L31/068

Abstract:
A method for manufacturing a solar cell includes performing a dry etching process to form a textured surface including a plurality of minute protrusions on a first surface of a semiconductor substrate, performing a first cleansing process for removing damaged portions of surfaces of the minute protrusions using a basic chemical and removing impurities adsorbed on the surfaces of the minute protrusions, performing a second cleansing process for removing impurities remaining or again adsorbed on the surfaces of the minute protrusions using an acid chemical after performing the first cleansing process, and forming an emitter region at the first surface of the semiconductor substrate.
Public/Granted literature
- US20140065757A1 METHOD FOR MANUFACTURING SOLAR CELL Public/Granted day:2014-03-06
Information query
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