发明授权
US08891574B2 Polarization purity control device and gas laser apparatus provided with the same
有权
极化纯度控制装置和具备该极化纯度的气体激光装置
- 专利标题： Polarization purity control device and gas laser apparatus provided with the same
- 专利标题（中）： 极化纯度控制装置和具备该极化纯度的气体激光装置
-
申请号： US13425825申请日： 2012-03-21
-
公开(公告)号： US08891574B2公开(公告)日： 2014-11-18
- 发明人: Shinji Nagai , Fumika Yoshida , Osamu Wakabayashi , Kouji Kakizaki
- 申请人： Shinji Nagai , Fumika Yoshida , Osamu Wakabayashi , Kouji Kakizaki
- 申请人地址： JP Tokyo
- 专利权人： Gigaphoton Inc.
- 当前专利权人： Gigaphoton Inc.
- 当前专利权人地址： JP Tokyo
- 代理机构： Kratz, Quintos & Hanson, LLP
- 优先权： JP2008-213529 20080822
- 主分类号： H01S3/22
- IPC分类号： H01S3/22 ; H01S3/10 ; H01S3/23 ; H01S3/225 ; H01S3/00
摘要：
A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.