Invention Grant
- Patent Title: Method of measuring uniformity of exposing light and exposure system for performing the same
- Patent Title (中): 测量曝光光的均匀性和进行曝光系统的方法
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Application No.: US13669751Application Date: 2012-11-06
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Publication No.: US08902414B2Publication Date: 2014-12-02
- Inventor: Jung-In Park , Cha-Dong Kim , Su-Yeon Sim , Sang-Hyun Yun , Hi-Kuk Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2011-0129667 20111206
- Main IPC: G01J1/00
- IPC: G01J1/00 ; G03F7/20

Abstract:
An exposure system includes an exposure apparatus, a mask, a test pattern portion and a uniformity measuring part. The exposure apparatus includes a first module and a second module. The first and second modules each emit light and are overlapped in an overlapping area. The mask includes a plurality of transmission portions which are spaced apart from each other. Each of the transmission portions has a width less than a width of the overlapping area. The test pattern portion includes a plurality of test patterns which are patterned by using the light transmitted through the transmission portions of the mask. The uniformity measuring part measures a uniformity of the test patterns.
Public/Granted literature
- US20130141714A1 METHOD OF MEASURING UNIFORMITY OF EXPOSING LIGHT AND EXPOSURE SYSTEM FOR PERFORMING THE SAME Public/Granted day:2013-06-06
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