Invention Grant
US08902414B2 Method of measuring uniformity of exposing light and exposure system for performing the same 有权
测量曝光光的均匀性和进行曝光系统的方法

Method of measuring uniformity of exposing light and exposure system for performing the same
Abstract:
An exposure system includes an exposure apparatus, a mask, a test pattern portion and a uniformity measuring part. The exposure apparatus includes a first module and a second module. The first and second modules each emit light and are overlapped in an overlapping area. The mask includes a plurality of transmission portions which are spaced apart from each other. Each of the transmission portions has a width less than a width of the overlapping area. The test pattern portion includes a plurality of test patterns which are patterned by using the light transmitted through the transmission portions of the mask. The uniformity measuring part measures a uniformity of the test patterns.
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