发明授权
- 专利标题： Corrosion-resistant CMP conditioning tools and methods for making and using same
- 专利标题（中）： 耐腐蚀CMP调理工具及其制造和使用方法
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申请号： US12791391申请日： 2010-06-01
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公开(公告)号： US08905823B2公开(公告)日： 2014-12-09
- 发明人: Jianhui Wu , Taewook Hwang , Ramanujam Vedantham , Charles Dinh-Ngoc , Thomas K. Puthanangady , Eric M. Schulz , Srinivasan Ramanath
- 申请人： Jianhui Wu , Taewook Hwang , Ramanujam Vedantham , Charles Dinh-Ngoc , Thomas K. Puthanangady , Eric M. Schulz , Srinivasan Ramanath
- 申请人地址： US MA Worcester FR Conflans-Sainte-Honorine
- 专利权人： Saint-Gobain Abrasives, Inc.,Saint-Gobain Abrasifs
- 当前专利权人： Saint-Gobain Abrasives, Inc.,Saint-Gobain Abrasifs
- 当前专利权人地址： US MA Worcester FR Conflans-Sainte-Honorine
- 代理机构： Abel Law Group, LLP
- 代理商 Joseph P. Sullivan
- 主分类号： B24B53/12
- IPC分类号： B24B53/12 ; B24B53/017 ; B24D3/08 ; B24D18/00
摘要：
An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.