Invention Grant
US08907693B2 Electromagnetic shield for testing integrated circuits 有权
用于测试集成电路的电磁屏蔽

Electromagnetic shield for testing integrated circuits
Abstract:
An embodiment of a probe card is proposed. The probe card comprises a plurality of probes. Each probe is adapted to contact a corresponding terminal of a circuit integrated in at least one die of a semiconductor material wafer during a test phase of the wafer. Said plurality of probes includes at least one probe adapted to provide and/or receive a radio frequency test signal to/from the corresponding terminal during the test phase. Said probe card comprises at least one electromagnetic shield structure corresponding to the at least one probe adapted to provide and/or receive the radio frequency test signal for the at least partial shielding of an electromagnetic field irradiated by such at least one probe adapted to provide and/or receive the radio frequency test signal.
Public/Granted literature
Information query
Patent Agency Ranking
0/0