Invention Grant
- Patent Title: Electromagnetic shield for testing integrated circuits
- Patent Title (中): 用于测试集成电路的电磁屏蔽
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Application No.: US12851680Application Date: 2010-08-06
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Publication No.: US08907693B2Publication Date: 2014-12-09
- Inventor: Alberto Pagani
- Applicant: Alberto Pagani
- Applicant Address: IT Agrate Brianza (MB)
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza (MB)
- Agency: Gardere Wynne Sewell LLP
- Priority: ITMI2009A1511 20090828
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/18 ; G01R1/067 ; G01R1/073

Abstract:
An embodiment of a probe card is proposed. The probe card comprises a plurality of probes. Each probe is adapted to contact a corresponding terminal of a circuit integrated in at least one die of a semiconductor material wafer during a test phase of the wafer. Said plurality of probes includes at least one probe adapted to provide and/or receive a radio frequency test signal to/from the corresponding terminal during the test phase. Said probe card comprises at least one electromagnetic shield structure corresponding to the at least one probe adapted to provide and/or receive the radio frequency test signal for the at least partial shielding of an electromagnetic field irradiated by such at least one probe adapted to provide and/or receive the radio frequency test signal.
Public/Granted literature
- US20110050267A1 ELECTROMAGNETIC SHIELD FOR TESTING INTEGRATED CIRCUITS Public/Granted day:2011-03-03
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