发明授权
US08911063B2 Thin film forming apparatus, thin film forming method, electro-mechanical transducer element, liquid ejecting head, and inkjet recording apparatus
有权
薄膜形成装置，薄膜形成方法，机电换能器元件，液体喷射头和喷墨记录装置
- 专利标题： Thin film forming apparatus, thin film forming method, electro-mechanical transducer element, liquid ejecting head, and inkjet recording apparatus
- 专利标题（中）： 薄膜形成装置，薄膜形成方法，机电换能器元件，液体喷射头和喷墨记录装置
-
申请号： US13751206申请日： 2013-01-28
-
公开(公告)号： US08911063B2公开(公告)日： 2014-12-16
- 发明人: Yasuhiro Watanabe , Osamu Machida , Akira Shimofuku , Ryo Tashiro , Atsushi Takeuchi
- 申请人： Yasuhiro Watanabe , Osamu Machida , Akira Shimofuku , Ryo Tashiro , Atsushi Takeuchi
- 申请人地址： JP Tokyo
- 专利权人： Ricoh Company, Ltd.
- 当前专利权人： Ricoh Company, Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Cooper & Dunham LLP
- 优先权： JP2012-017938 20120131
- 主分类号： B41J2/045
- IPC分类号： B41J2/045 ; H05K13/00 ; H02N11/00 ; B41J2/14 ; H01L21/00 ; B05C9/10 ; H01L21/67
摘要：
A thin film forming apparatus which automatically forms, on an electrode layer formed on a substrate, a functional thin film which is crystallized from a precursor layer is disclosed, including a water-repellant film forming unit which forms, on a region other than a region on which is to be formed the functional thin film on the electrode layer, a water-repellant film which includes a self-assembled monolayer; an inkjet coating unit which coats, on the region on which is to be formed the functional thin film on the electrode layer, the precursor layer by an inkjet method; and a controller which controls, to within a predetermined time, a time from forming the water-repellant film with the water-repellant film forming unit to coating the precursor layer with the inkjet coating unit.