发明授权
US08911928B2 Resist composition, method of forming resist pattern, polymeric compound and method of producing the same 有权
抗蚀剂组合物,抗蚀剂图案形成方法,聚合物及其制造方法

Resist composition, method of forming resist pattern, polymeric compound and method of producing the same
摘要:
A resist composition including a base component (A) that exhibits changed solubility in a developing solution under action of acid and an acid generator component (B) that generates acid upon exposure, wherein the base component (A) contains a resin component (A1) including a structural unit (a0) represented by general formula (a0-1) shown below and a structural unit (a1)) containing an acid decomposable group that exhibits increased polarity under action of acid, and the amount of the structural unit (a0) is less than 50 mol %, wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; R1 represents a divalent linking group; R2 represents a —SO2— containing cyclic group; and v represents 0 or 1.
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