发明授权
US08911928B2 Resist composition, method of forming resist pattern, polymeric compound and method of producing the same
有权
抗蚀剂组合物,抗蚀剂图案形成方法,聚合物及其制造方法
- 专利标题: Resist composition, method of forming resist pattern, polymeric compound and method of producing the same
- 专利标题(中): 抗蚀剂组合物,抗蚀剂图案形成方法,聚合物及其制造方法
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申请号: US13477516申请日: 2012-05-22
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公开(公告)号: US08911928B2公开(公告)日: 2014-12-16
- 发明人: Tomoyuki Hirano , Daiju Shiono , Daichi Takaki , Junichi Tsuchiya
- 申请人: Tomoyuki Hirano , Daiju Shiono , Daichi Takaki , Junichi Tsuchiya
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: JPP2011-123261 20110601
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/38 ; C08F220/32 ; G03F7/039 ; G03F7/20 ; C08F220/58
摘要:
A resist composition including a base component (A) that exhibits changed solubility in a developing solution under action of acid and an acid generator component (B) that generates acid upon exposure, wherein the base component (A) contains a resin component (A1) including a structural unit (a0) represented by general formula (a0-1) shown below and a structural unit (a1)) containing an acid decomposable group that exhibits increased polarity under action of acid, and the amount of the structural unit (a0) is less than 50 mol %, wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; R1 represents a divalent linking group; R2 represents a —SO2— containing cyclic group; and v represents 0 or 1.
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