Invention Grant
- Patent Title: Method and system for controlling radio frequency power
- Patent Title (中): 控制射频功率的方法和系统
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Application No.: US14151321Application Date: 2014-01-09
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Publication No.: US08912835B2Publication Date: 2014-12-16
- Inventor: Siddarth Nagarkatti , Feng Tian , David Lam , Abdul Rashid , Souheil Benzerrouk , Ilya Bystryak , David Menzer , Jack J. Schuss , Jesse E. Ambrosina
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments Inc.
- Current Assignee: MKS Instruments Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: H03K3/00
- IPC: H03K3/00 ; H03K5/01
Abstract:
A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
Public/Granted literature
- US20140306742A1 Method and System for Controlling Radio Frequency Power Public/Granted day:2014-10-16
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