公开(公告)号：US08912835B2

公开(公告)日：2014-12-16

申请号：US14151321

申请日：2014-01-09

Applicant: MKS Instruments, Inc.

Inventor： Siddarth Nagarkatti ,  Feng Tian ,  David Lam ,  Abdul Rashid ,  Souheil Benzerrouk ,  Ilya Bystryak ,  David Menzer ,  Jack J. Schuss ,  Jesse E. Ambrosina

IPC: H03K3/00 ,  H03K5/01

CPC classification number: H03K5/01 ,  H03F3/189 ,  H03F3/217 ,  H03F2200/105 ,  H03F2200/375 ,  H03F2200/387 ,  H03G3/3047

Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.

Abstract translation: 一种用于控制脉冲功率的方法，包括从功率放大器测量第一功率脉冲以获得数据。 该方法还包括产生第一信号以调整输出功率的第二脉冲，第一信号与数据相关，以最小化功率设定点与第二脉冲的基本稳定部分之间的功率差。 该方法还包括产生第二信号以调整传递功率的第二脉冲，第二信号与数据相关，以最小化第二脉冲的峰值与第二脉冲的基本上稳定的部分之间的幅度差异。