发明授权
- 专利标题: III-nitride semiconductor laser diode
- 专利标题(中): III族氮化物半导体激光二极管
-
申请号: US13328622申请日: 2011-12-16
-
公开(公告)号: US08917750B2公开(公告)日: 2014-12-23
- 发明人: Masahiro Adachi , Shinji Tokuyama , Yohei Enya , Takashi Kyono , Yusuke Yoshizumi , Katsushi Akita , Masaki Ueno , Koji Katayama , Takatoshi Ikegami , Takao Nakamura
- 申请人: Masahiro Adachi , Shinji Tokuyama , Yohei Enya , Takashi Kyono , Yusuke Yoshizumi , Katsushi Akita , Masaki Ueno , Koji Katayama , Takatoshi Ikegami , Takao Nakamura
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 代理机构: Venable LLP
- 代理商 Michael A. Sartori; Tamatane J. Aga
- 优先权: JP2009-146701 20090619; JP2009-228824 20090930
- 主分类号: H01S5/00
- IPC分类号: H01S5/00 ; H01S5/343 ; H01S5/32 ; H01S5/20 ; B82Y20/00 ; H01S5/30 ; H01S5/22
摘要:
Provided is a III-nitride semiconductor laser diode which is capable of lasing at a low threshold. A support base has a semipolar or nonpolar primary surface. The c-axis Cx of a III-nitride is inclined relative to the primary surface. An n-type cladding region and a p-type cladding region are provided above the primary surface of the support base. A core semiconductor region is provided between the n-type cladding region and the p-type cladding region. The core semiconductor region includes a first optical guide layer, an active layer, and a second optical guide layer. The active layer is provided between the first optical guide layer and the second optical guide layer. The thickness of the core semiconductor region is not less than 0.5 μm. This structure allows the confinement of light into the core semiconductor region without leakage of light into the support base, and therefore enables reduction in threshold current.
公开/授权文献
- US20120128016A1 III-NITRIDE SEMICONDUCTOR LASER DIODE 公开/授权日:2012-05-24
信息查询