Invention Grant
US08921161B2 Semiconductor device and method of forming EWLB package containing stacked semiconductor die electrically connected through conductive vias formed in encapsulant around die
有权
半导体器件和形成包含堆叠半导体管芯的EWLB封装的方法,其通过形成在管芯周围的密封剂中的导电通孔电连接
- Patent Title: Semiconductor device and method of forming EWLB package containing stacked semiconductor die electrically connected through conductive vias formed in encapsulant around die
- Patent Title (中): 半导体器件和形成包含堆叠半导体管芯的EWLB封装的方法,其通过形成在管芯周围的密封剂中的导电通孔电连接
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Application No.: US13732150Application Date: 2012-12-31
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Publication No.: US08921161B2Publication Date: 2014-12-30
- Inventor: Zigmund R. Camacho
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/02 ; H01L25/065 ; H01L21/56 ; H01L23/498 ; H01L23/31 ; H01L23/00

Abstract:
A semiconductor device has a first semiconductor die and first encapsulant deposited around the first semiconductor die. A first insulating layer is formed over the first semiconductor die and first encapsulant. A first conductive layer is formed over the first insulating layer and electrically connected to a contact pad of the first semiconductor die. A second semiconductor die is mounted to the first insulating layer and first conductive layer. A second encapsulant is deposited around the second semiconductor die. A second insulating layer is formed over the second semiconductor die and second encapsulant. A second conductive layer is formed over the second insulating layer and electrically connected to a contact pad of the second semiconductor die. A plurality of conductive vias is formed continuously through the first and second encapsulants outside a footprint of the first and second semiconductor die electrically connected to the first and second conductive layers.
Public/Granted literature
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