发明授权
US08944080B2 Cleaning system, cleaning device, and method of using cleaning device
有权
清洁系统，清洁装置和使用清洁装置的方法
- 专利标题： Cleaning system, cleaning device, and method of using cleaning device
- 专利标题（中）： 清洁系统，清洁装置和使用清洁装置的方法
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申请号： US13196086申请日： 2011-08-02
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公开(公告)号： US08944080B2公开(公告)日： 2015-02-03
- 发明人: Yen-Shao Peng , Chia-Hao Hsueh , Kuo-Hsing Teng
- 申请人： Yen-Shao Peng , Chia-Hao Hsueh , Kuo-Hsing Teng
- 申请人地址： TW Hsinchu
- 专利权人： VisEra Technologies Company Limited
- 当前专利权人： VisEra Technologies Company Limited
- 当前专利权人地址： TW Hsinchu
- 代理机构： Muncy, Geissler, Olds & Lowe, P.C.
- 主分类号： B08B9/027
- IPC分类号： B08B9/027 ; H01L21/67
摘要：
A cleaning device is provided, including a top portion, a middle portion, and a bottom portion. The top portion includes a first opening. The middle portion is connected to the top portion, and includes an inlet on a lateral side, an annular channel communicated with the inlet, and a second opening communicated with the first opening. The bottom portion is connected to the middle portion, and includes a reservoir and a third opening. The third opening communicates the second opening and the reservoir.
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