发明授权
- 专利标题: Method of manufacturing a ball grid array substrate or a semiconductor chip package
- 专利标题(中): 制造球栅阵列基板或半导体芯片封装的方法
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申请号: US14028837申请日: 2013-09-17
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公开(公告)号: US08945993B2公开(公告)日: 2015-02-03
- 发明人: Jung Hyun Park , Nam Keun Oh , Sang Duck Kim , Jong Gyu Choi , Young Ji Kim , Ji Eun Kim , Myung Sam Kang
- 申请人: Samsung Electro-Mechanics Co., Ltd.
- 申请人地址: KR Suwon
- 专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址: KR Suwon
- 优先权: KR10-2009-0102733 20091028
- 主分类号: H01L21/332
- IPC分类号: H01L21/332 ; H01L21/768 ; H01L23/13 ; H01L23/00 ; H01L21/02 ; H01L23/31
摘要:
A method of manufacturing a ball grid array substrate includes: forming a first circuit pattern and a second circuit pattern on a first metal carrier and a second metal carrier, respectively; stacking a first insulating layer and a second insulating layer with a separable material interposed therebetween, wherein each of the first and second insulating layers has first and second surfaces opposing each other, and the first surface contacts the separable material; burying the first and second circuit patterns in the second surfaces of the first and second insulating layers, respectively; removing the first and second metal carriers; removing the separable material to separate the first and second insulating layers from each other; and forming an opening in each of the first and second insulating layers to connect the first and second surfaces with each other. The method may also be part of a process for manufacturing a semiconductor package.
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