Invention Grant
- Patent Title: Compact high-voltage electron gun
- Patent Title (中): 紧凑型高压电子枪
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Application No.: US13679072Application Date: 2012-11-16
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Publication No.: US08957394B2Publication Date: 2015-02-17
- Inventor: Alan D. Brodie , Joseph Maurino , Mark A. McCord , Paul F. Petric
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milipitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milipitas
- Agency: Okamoto & Benedicto LLP
- Main IPC: H01J23/06
- IPC: H01J23/06 ; H01J23/08 ; G21K5/08 ; H01J37/065 ; H01J29/48

Abstract:
One embodiment relates to a high-voltage electron gun including an insulator stand-off having a resistive layer. The resistive layer is at least on an interior surface of the insulator stand-off. A cathode holder is coupled to one end of the insulator 115 stand-off, and an anode is coupled to the other end. The resistive layer advantageously increases the surface breakdown field strength for the insulator stand-off and so enables a compact design for the high-voltage electron gun. Other embodiments, aspects and feature are also disclosed.
Public/Granted literature
- US20130134324A1 COMPACT HIGH-VOLTAGE ELECTRON GUN Public/Granted day:2013-05-30
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