利索-全球专利检索

  1. 登录
  2. 注册
发明授权
US08958574B2 Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone 有权
应变和压力感测装置，麦克风，制造应变和压力感测装置的方法以及制造麦克风的方法

Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone
摘要：
According to one embodiment, a strain and pressure sensing device includes a semiconductor circuit unit and a sensing unit. The semiconductor circuit unit includes a semiconductor substrate and a transistor. The transistor is provided on a semiconductor substrate. The sensing unit is provided on the semiconductor circuit unit, and has space and non-space portions. The non-space portion is juxtaposed with the space portion. The sensing unit further includes a movable beam, a strain sensing element unit, and first and second buried interconnects. The movable beam has fixed and movable portions, and includes first and second interconnect layers. The fixed portion is fixed to the non-space portion. The movable portion is separated from the transistor and extends from the fixed portion into the space portion. The strain sensing element unit is fixed to the movable portion. The first and second buried interconnects are provided in the non-space portion.
摘要（中）：

根据一个实施例，应变和压力感测装置包括半导体电路单元和感测单元。 半导体电路单元包括半导体衬底和晶体管。 晶体管设置在半导体衬底上。 感测单元设置在半导体电路单元上，并且具有空间和非空间部分。 非空间部分与空间部分并置。 感测单元还包括可移动光束，应变传感元件单元以及第一和第二掩埋互连。 可移动光束具有固定和可移动部分，并且包括第一和第二互连层。 固定部固定在非空间部。 可动部分与晶体管分离，并从固定部分延伸到空间部分。 应变传感元件单元固定在可动部上。 第一和第二掩埋互连件设置在非空间部分中。

公开/授权文献
信息查询
Espacenet
0/0