发明授权
- 专利标题： Double-sided diaphragm micro gas-preconcentrator
- 专利标题（中）： 双面隔膜微气预收敛器
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申请号： US13570249申请日： 2012-08-09
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公开(公告)号： US08969976B2公开(公告)日： 2015-03-03
- 发明人: Xiaosong Du , Ze Wu , Yi Li , Yadong Jiang , Dong Qiu
- 申请人： Xiaosong Du , Ze Wu , Yi Li , Yadong Jiang , Dong Qiu
- 申请人地址： CN Chengdu, Sichuan Province
- 专利权人： University of Electronic Science and Technology of China
- 当前专利权人： University of Electronic Science and Technology of China
- 当前专利权人地址： CN Chengdu, Sichuan Province
- 优先权： CN201210078853 20120323
- 主分类号： H01L27/02
- IPC分类号： H01L27/02
摘要：
A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by bonding an upper silicon substrate with a lower silicon substrate. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.
公开/授权文献
- US20130249022A1 Double-sided diaphragm micro gas-preconcentrator 公开/授权日：2013-09-26