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公开(公告)号:US08969976B2
公开(公告)日:2015-03-03
申请号:US13570249
申请日:2012-08-09
申请人: Xiaosong Du , Ze Wu , Yi Li , Yadong Jiang , Dong Qiu
发明人: Xiaosong Du , Ze Wu , Yi Li , Yadong Jiang , Dong Qiu
IPC分类号: H01L27/02
CPC分类号: G01N30/93 , B01L3/5027 , B01L3/502707 , B01L2300/069 , B01L2300/0816 , B01L2300/0864 , B01L2300/0883 , G01N1/4005 , G01N1/405 , G01N30/08 , G01N2030/085
摘要: A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by bonding an upper silicon substrate with a lower silicon substrate. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.
摘要翻译: 双面隔膜微气体预浓缩器具有通过将上硅基板与下硅基板接合而形成的微气室。 在每个硅衬底上提供一个或多个悬浮膜。 提供悬浮膜的硅完全除去以形成空腔。 薄膜加热器沉积在每个悬浮膜上。 吸附膜涂覆在每个悬浮膜的内壁上。 因此,本发明的预浓缩器的上侧和下侧是悬浮膜,其改善了隔膜上吸附膜的面积。 结果,在保持平面膜片预浓缩器的小热容量,快速加热速率和低功耗特征的同时,提高了预浓缩因子。
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公开(公告)号:US20130249022A1
公开(公告)日:2013-09-26
申请号:US13570249
申请日:2012-08-09
申请人: Xiaosong Du , Ze Wu , Yi Li , Yadong Jiang , Dong Qiu
发明人: Xiaosong Du , Ze Wu , Yi Li , Yadong Jiang , Dong Qiu
IPC分类号: H01L27/02
CPC分类号: G01N30/93 , B01L3/5027 , B01L3/502707 , B01L2300/069 , B01L2300/0816 , B01L2300/0864 , B01L2300/0883 , G01N1/4005 , G01N1/405 , G01N30/08 , G01N2030/085
摘要: A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by bonding an upper silicon substrate with a lower silicon substrate. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.
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公开(公告)号:US20120235958A1
公开(公告)日:2012-09-20
申请号:US13049956
申请日:2011-03-17
申请人: Ming-Li CHEN , Chien-Chih LIN , Sheng-Han TSAI , Kun-Ze WU
发明人: Ming-Li CHEN , Chien-Chih LIN , Sheng-Han TSAI , Kun-Ze WU
IPC分类号: G09G5/00 , G06K19/073
CPC分类号: G09G3/20 , G06K19/0711 , G06K19/07707 , G09G2330/02 , G09G2330/026
摘要: A sheet of piezoelectric material is configured in a chip card; alternating current (AC) is generated through bending the piezoelectric material back and forth, the alternating current (AC) is then rectified into direct current (DC) to energize the chip card display system to display stored information.
摘要翻译: 一片压电材料配置在芯片卡中; 交流电源(AC)通过前后弯曲压电材料产生,然后将交流电(AC)整流为直流电(DC),为芯片卡显示系统供电以显示存储的信息。
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