Invention Grant
- Patent Title: Method and system for replacing a pattern in a layout
- Patent Title (中): 用于替换布局中的图案的方法和系统
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Application No.: US14068006Application Date: 2013-10-31
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Publication No.: US08977991B2Publication Date: 2015-03-10
- Inventor: Huang-Yu Chen , Yuan-Te Hou , Chung-Min Fu , Chung-Hsing Wang , Wen-Hao Chen , Yi-Kan Cheng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Agent Steven E. Koffs
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A received layout identifies a plurality of circuit components to be included in an integrated circuit (IC) layer for double patterning the layer using two photomasks, the layout including a plurality of first patterns to be included in the first photomask and at least one second pattern to be included in the second photomask. A selected one of the first patterns has first and second endpoints, to be replaced by a replacement pattern connecting the first endpoint to a third endpoint. At least one respective keep-out region is provided adjacent to each respective remaining first pattern except for the selected first pattern. Data are generated representing the replacement pattern, such that no part of the replacement pattern is formed in any of the keep-out regions. Data representing the remaining first patterns and the replacement pattern are output.
Public/Granted literature
- US20140059504A1 METHOD AND SYSTEM FOR REPLACING A PATTERN IN A LAYOUT Public/Granted day:2014-02-27
Information query