发明授权
- 专利标题: Nitride semiconductor device and production method thereof
- 专利标题(中): 氮化物半导体器件及其制造方法
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申请号: US13856633申请日: 2013-04-04
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公开(公告)号: US08981340B2公开(公告)日: 2015-03-17
- 发明人: Yasutoshi Kawaguchi , Toshitaka Shimamoto , Akihiko Ishibashi , Isao Kidoguchi , Toshiya Yokogawa
- 申请人: Panasonic Corporation
- 申请人地址: JP Osaka
- 专利权人: Panasonic Intellectual Property Management Co., Ltd.
- 当前专利权人: Panasonic Intellectual Property Management Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Renner, Otto, Boisselle & Sklar, LLP
- 优先权: JP2003-333217 20030925; JP2004-065163 20040309
- 主分类号: H01S5/32
- IPC分类号: H01S5/32 ; B82Y20/00 ; H01L33/32 ; H01S5/343 ; H01L33/04 ; H01L33/14 ; H01S5/20 ; H01S5/22 ; H01S5/30 ; H01L33/02
摘要:
A nitride semiconductor device according to the present invention includes a p-type nitride semiconductor layer, an n-type nitride semiconductor layer, and an active layer interposed between the p-type nitride semiconductor layer and the n-type nitride semiconductor layer. The p-type nitride semiconductor layer includes: a first p-type nitride semiconductor layer containing Al and Mg; and a second p-type nitride semiconductor layer containing Mg. The first p-type nitride semiconductor layer is located between the active layer and the second p-type nitride semiconductor layer, and the second p-type nitride semiconductor layer has a greater band gap than a band gap of the first p-type nitride semiconductor layer.
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