Invention Grant
- Patent Title: Method and apparatus for depositing LED organic film
- Patent Title (中): 用于沉积LED有机膜的方法和装置
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Application No.: US13088323Application Date: 2011-04-15
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Publication No.: US08986780B2Publication Date: 2015-03-24
- Inventor: Vladimir Bulovic , Marc A. Baldo , Martin A. Schmidt , Valerie Gassend , Jianglong Chen
- Applicant: Vladimir Bulovic , Marc A. Baldo , Martin A. Schmidt , Valerie Gassend , Jianglong Chen
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Main IPC: B05D3/04
- IPC: B05D3/04 ; B05D1/12 ; H01L51/00 ; H01L51/56

Abstract:
The disclosure relates to a method for depositing an organic film layer on a substrate. In one implementation a method to deposit organic film by generating vaporized organic particles; streaming a carrier fluid proximal to a source to carry the vaporized organic particles and solid organic particles from the source towards the substrate; transporting the vaporized and solid organic particles through a discharge nozzle with a plurality of micro-pore openings, placed between the source and the substrate, that permits the passage of at least a portion of the vaporized or solid organic particles through the micro-pores; depositing the vaporized organic particles and the solid organic particles that are transported through the discharge nozzle onto the substrate.
Public/Granted literature
- US20120015104A1 Method and Apparatus for Depositing LED Organic Film Public/Granted day:2012-01-19
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