Invention Grant
- Patent Title: Compensation of changes in MEMS capacitive transduction
- Patent Title (中): MEMS电容转换的变化补偿
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Application No.: US13786686Application Date: 2013-03-06
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Publication No.: US09000833B2Publication Date: 2015-04-07
- Inventor: Aaron Caffee , Emmanuel P. Quevy
- Applicant: Silicon Laboratories Inc.
- Applicant Address: US TX Austin
- Assignee: Silicon Laboratories Inc.
- Current Assignee: Silicon Laboratories Inc.
- Current Assignee Address: US TX Austin
- Agency: Abel Law Group, LLP
- Main IPC: H01L41/00
- IPC: H01L41/00 ; H02N1/00 ; B81B7/00

Abstract:
A method for compensating for strain on a MEMS device includes generating a signal indicative of a strain on the MEMS device in a first mode of operating a system including the MEMS device. The method includes compensating for the strain in a second mode of operating the system based on the signal. Generating the signal may include comparing an indicator of a resonant frequency of the MEMS device to a predetermined resonant frequency of the MEMS device. Generating the signal may include comparing a first output of a strain-sensitive device to a second output of a strain-insensitive device and generating an indicator thereof. Generating the signal may include sensing a first capacitive transduction of strain-sensitive electrodes of the MEMS device in the first mode and generating the signal based thereon. The strain-sensitive electrodes of the MEMS device may be disabled in the second mode.
Public/Granted literature
- US20140253219A1 COMPENSATION OF CHANGES IN MEMS CAPACITIVE TRANSDUCTION Public/Granted day:2014-09-11
Information query
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