Invention Grant
- Patent Title: Dynamic current distribution control apparatus and method for wafer electroplating
- Patent Title (中): 晶圆电镀动态电流分配控制装置及方法
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Application No.: US13306527Application Date: 2011-11-29
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Publication No.: US09045840B2Publication Date: 2015-06-02
- Inventor: David W. Porter , Jonathan D. Reid , Frederick D. Wilmot
- Applicant: David W. Porter , Jonathan D. Reid , Frederick D. Wilmot
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/02
- IPC: C25D17/02 ; C25D21/12 ; C25D17/00 ; C25D17/06 ; C25D17/10 ; C25D17/12

Abstract:
Methods, systems, and apparatus for plating a metal onto a work piece are described. In one aspect, an apparatus includes a plating chamber, a substrate holder, an anode chamber housing an anode, and an ionically resistive ionically permeable element positioned between a substrate and the anode chamber during electroplating. The anode chamber may be movable with respect to the ionically resistive ionically permeable element to vary a distance between the anode chamber and the ionically resistive ionically permeable element during electroplating. The anode chamber may include an insulating shield oriented between the anode and the ionically resistive ionically permeable element, with opening in a central region of the insulating shield.
Public/Granted literature
- US20130134045A1 DYNAMIC CURRENT DISTRIBUTION CONTROL APPARATUS AND METHOD FOR WAFER ELECTROPLATING Public/Granted day:2013-05-30
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